The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1998
Filed:
Dec. 05, 1996
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
Method and apparatus for estimating the performance of a gas tube. The method comprising the steps of: (a) preparing a sample tube to be analyzed and cutting the sample tube in a desired size and shape; (b) examining distribution of defects and surface condition of the cut sample tube with an optical microscope; (c) analyzing structure and composition of surface defects which can not be measured in the step (b), to determine type and composition of the surface defects and shape of a surface grain; (d) analyzing structure of an inner surface-treated layer of the sample tube along the thickness thereof; and (e) synthetically analyzing data for defect density and surface roughness, which are numerically expressed through the steps (a) to (d), to define a reference data which can be used in a semiconductor manufacturing process.