The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1998
Filed:
Jun. 18, 1997
Frank B Sperling, Eindhoven, NL;
Henricus W Janssen, Eindhoven, NL;
U.S. Philips Corporation, New York, NY (US);
Abstract
A positioning device with a base and a displaceable unit which is displaceable relative to the base parallel to an X-direction and parallel to a Y-direction by means of an X-actuator and a Y-actuator. The X-actuator and the Y-actuator each have a first part which is coupled to the displaceable unit, seen parallel to the X-direction and Y-direction, respectively, and a second part which is coupled to a common balancing unit, seen parallel to the X-direction and the Y-direction, respectively, which balancing unit is displaceably guided parallel to the X-direction and to the Y-direction along a guide which extends parallel to the X-direction and the Y-direction and which is fastened to the base. During operation the first parts of the X-actuator and the Y-actuator exert on the second parts reaction forces which are directed parallel to the X-direction and to the Y-direction, respectively, whereby the common balancing unit is displaced parallel to the X-direction and the Y-direction, respectively. It is prevented thereby that the reaction forces are transmitted into the base, so that mechanical vibrations of the base are reduced. In a special embodiment, the balancing unit comprises a support body which comprises a surface which extends parallel to the X-direction and the Y-direction and along which the displaceable unit is guided. The positioning device can be used for the displacement and positioning of a substrate holder in a lithographic device for the manufacture of semiconductor substrates.