The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 1998

Filed:

Jul. 11, 1995
Applicant:
Inventors:

Sergey V Broude, Newton Centre, MA (US);

Nicholas Allen, Bedford, MA (US);

Abdu Boudour, West Newton, MA (US);

Eric Chase, Carlisle, MA (US);

Carl Johnson, Tewksbury, MA (US);

Pascal Miller, North Chelmsford, MA (US);

Jay Ormsby, Salem, MA (US);

Assignee:

QC Optics, Inc., Wilmington, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
25055946 ; 2502 / ; 25055941 ; 209555 ;
Abstract

An inspection system and an inspection method, the method including detecting flaws on a surface, determining the size, count, and position of flaws on the surface, providing a representation of the detected flaws by size, count, and position on a display, setting a display threshold value which is a function of a number of particles of a particular size to be displayed on the display, determining when the display threshold is breached and in response adjusting the display to cease displaying those flaws, storing at least one inspection threshold value, and determining when the inspection threshold value is breached and in response outputting an inspection interrupt signal to stop the inspection after the inspection threshold value is breached.


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