The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1998
Filed:
Nov. 24, 1997
Abdelkrim Tatah, Arlington, MA (US);
Carl V Thompson, Acton, MA (US);
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Massachusetts Institute of Technology, Cambridge, MA (US);
Abstract
A method for simultaneously annealing a metal or dielectric line and cleaning metal debris deposited in the vicinity of the line by generating an ultraviolet laser beam, focusing the ultraviolet laser beam onto the line, and exposing the line to the ultraviolet laser beam for a period of time sufficient to melt and reflow the line and evaporate small particles of debris. The method may also be used to repair metal or dielectric lines. Laser ablation forward metal deposition may be used in combination with the UV laser annealing method in order to perform the repair.