The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1998
Filed:
Jun. 13, 1996
Heinz Schneider, Jena, DE;
Klaus Schultz, Jena, DE;
Jenoptik Aktiengesellschaft, Jena, DE;
Abstract
An arrangement for generating a purified, low-turbulence air flow for supplying local clean rooms is aimed to reduce the constructional depth of an air processing installation and, in addition, to extensively prevent the transmission of vibrations from the air flow-generator to the equipment unit to be supplied. The wall of the plenum chamber located opposite an outlet opening in the plenum chamber adjoins a filter accommodated in a plenum chamber at the side for the inlet of unpurified air. A space remains open between the wall and the filter. This space communicates with the rest of the space in the plenum chamber and serves primarily to form the plenum. The arrangement is applicable in the manufacturing of integrated circuits.