The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 1998
Filed:
Feb. 07, 1996
Henry R Miranda, Milpitas, CA (US);
Other;
Abstract
The present invention provides for an easily replaceable dump valve assembly to drain a tank in a semiconductor bath system. The dump valve assembly has a drain at a bottom of the tank, a cap, a sealing plate and an actuator. The drain has an end with a flange around it. The cap has a base and side, with the side having an inward protrusion so that the cap can be fitted over the drain with the inward protrusion engaging the flange. The cap can be removed from the drain by simply disengaging the protrusion from the flange. The sealing plate has a surface to contact the end of the drain opening to seal the drain. To move the sealing plate, the actuator is connected to the cap and plate. The actuator drives the plate away from the cap base to place the plate surface against the drain end to close the dump valve assembly and drives the plate toward the cap to remove the plate surface from the drain opening to open the dump valve assembly.