The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 1998
Filed:
Mar. 24, 1995
Takehiko Mayama, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An anti-vibration system includes an anti-vibration table on which a precise machine, having a driving device and having directions of freedom, is mounted, a plurality of supporting mechanisms for supporting the anti-vibration table and for suppressing vibration of the table, a plurality of actuators for applying a control force to the anti-vibration table, a vibration sensor for detecting vibration of the anti-vibration table, and a control device for actuating the actuators on the basis of an output of the vibration sensor to actively control vibration of the anti-vibration table. The actuators are disposed each in a direction forming a certain angle with respect to the directions of freedom of the precise machine. The angle is determined on the basis of a control force required to be applied by the actuators to the table to control the vibration of the table with respect to each direction of freedom of the precise machine. A drive reactive force to be applied to the anti-vibration table from the precise machine in response to the operation of the driving device, is distributed to the supporting mechanisms and the actuators.