The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 1998
Filed:
Aug. 05, 1997
Makoto Ozawa, Tokyo, JP;
Mitsuhiro Hirano, Tokyo, JP;
Kokusai Electric Co., Ltd., Tokyo, JP;
Abstract
A semiconductor manufacturing equipment, which comprises a boat elevator installed below a reaction chamber for loading a boat into the reaction chamber, cassette stocker installed opposite to the boat elevator, a wafer carrier installed between the cassette stocker and the boat elevator and used for transferring wafers between the cassette stocker and the boat, and a load-lock chamber for accommodating the boat elevator, whereby wafers are carried in the atmospheric air within the semiconductor manufacturing equipment, and the transport time is set in such manner that an increase of a natural oxide film formed on the wafers is 2 angstroms or less.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile