The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 1998
Filed:
Jul. 29, 1996
Yong-Ki Min, Seoul, KR;
Daewoo Electronics, Co., Ltd., Seoul, KR;
Abstract
A method for electrically connecting a thin film electrode with a connecting terminal on an active matrix in a thin film actuated mirror includes the steps of: forming a thin film sacrificial layer having an empty cavity on top of the active matrix, wherein the empty cavity encompasses the connecting terminal; forming an elastic layer on top of the thin film sacrificial layer including the empty cavity; creating a hole on the elastic layer, the hole exposing the connecting terminal and having inner surfaces; forming the thin film electrode on top of the elastic layer including the inner surfaces of the hole to thereby establish an electrical connection between the thin film electrode to the connecting terminal; and filling the hole with an insulating material. The insulating material prevents the thin film electrodes in each of the thin film actuated mirrors from coming into an electrical contact with each other, thereby preventing a short-circuit therebetween.