The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 1998
Filed:
Nov. 01, 1996
Applicant:
Inventor:
Anthony J Armini, Manchester, MA (US);
Assignee:
Implant Sciences Corp., Wakefield, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
31511181 ; 31511121 ; 31511171 ; 2504 / ;
Abstract
An ion source generating device having a main arc chamber and an auxiliary chamber attached to and in fluid communication with the main chamber. The auxiliary chamber contains solid reactants consisting of Ca.sub.3 P.sub.2 or Mg.sub.3 As.sub.2 to provide a reduction reaction of feed gas such as HF or H.sub.2 O respectively, passing through the chamber and into the main chamber, in which the ion beam is generated.