Carbon dioxide jet spray disk cleaning system

Abstract

Apparatus for cleaning disks during processing. The apparatus is used with a disk processing system having a conveyor belt for transporting a disk carrier containing disks. The conveyor belt and the disk carrier have openings therein. A cleaning station is disposed above the conveyor belt and has an opening therein that isolates the cleaning station from the processing system. The cleaning station has a recirculating blower system, a laminar flow screen, a HEPA filter, and a ducting system for recirculating purified air or inert gas. A carbon dioxide jet spray cleaning system is provided that has a plurality of sets of jet spray nozzles disposed in the cleaning station that are coupled by way of manifolds to a liquid carbon dioxide tank that supplies liquid carbon dioxide to the nozzles. A lifting mechanism is disposed beneath the conveyor belt that has a lower support member that is caused to extend upward through the openings to lift one disk at a time upward into the cleaning station in front of the sets of jet spray nozzles for cleaning An upper support member is disposed above the lifted disk that holds it during cleaning. In a first embodiment, the disk is held in a fixed position while the nozzles are scanned across it, while in a second embodiment, the nozzles are fixed and the disk is moved past the nozzles.