The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1998
Filed:
Mar. 24, 1997
Nobutaka Magome, Kawasaki, JP;
Shinji Mizutani, Kawasaki, JP;
Nikon Corporation, , JP;
Abstract
An alignment method for achieving accurate alignment by accurately eliminating an isolated area with a large nonlinear component of an alignment error from sample areas. A conversion parameter is calculated by statistical processing on the basis of a result obtained by measuring the position of each sample area on a substrate to be processed in advance, and each area on the substrate is aligned on the basis of arrangement coordinate values calculated using the conversion parameter. This method relates to a method of aligning each of a plurality of areas to be processed arranged on the substrate on the basis of arrangement coordinates on a first coordinate system (x, y) set on the substrate to a predetermined process position in a second coordinate system (X, Y) for defining the moving position of the substrate.