The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1998
Filed:
Aug. 21, 1995
Applicant:
Inventors:
Vladimir Schwartz, Lexington, MA (US);
Michael Schwartz, Lexington, MA (US);
Klaus Bierwagen, Waltham, MA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C / ;
U.S. Cl.
CPC ...
118 52 ; 118 56 ; 118500 ; 118730 ; 427240 ;
Abstract
An apparatus for the spin coating of substrates including a substrate carrier, a motor for rotating the substrate carrier, and a spinning bowl surrounding the substrate carrier. A lid is also provided in this spin coating apparatus which at least partially covers the spinning bowl for diminishing the escape for fumes into the ambient atmosphere during the spin coating of a substrate carried by the substrate carrier. The lid is also designed for improving the air flow around the substrate carried by the substrate carrier during the spin coating of the substrate.