The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 1998
Filed:
Sep. 13, 1994
Sean Samuel Cahill, Palo Alto, CA (US);
Tokudai Neda, Tokyo, JP;
Tokyo Gas Co., Ltd., Tokyo, JP;
Abstract
A pressure switch element (1) including a semiconductor layer (3) having a diaphragm portion (5) in its center and a plate (2) having a through hole communicating with the exterior, which are stacked one on another so as to define a gas space (6) between the diaphragm portion of the semiconductor layer and the plate. The element (1) further includes an insulating layer (4) provided on the lower surface of the diaphragm portion (5), a first switch electrode (9) provided on the lower surface of the insulating layer (4), and a second switch electrode (10) behaving as a fixed electrode provided on the plate (2), such that chattering is prevented with a simple structure without using a complex electronic circuit.