The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 1998
Filed:
Apr. 26, 1996
Applicant:
Inventor:
Akira Isobe, Tokyo, JP;
Assignee:
NEC Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
257 48 ; 257528 ; 257758 ; 257773 ; 257776 ; 438 14 ;
Abstract
A test line (12) is formed between a pair of current sypplying terminals (11). A step pattern (14) composed of polysilicon or the like is formed below the test line (12) through an inter-layer insulation film. One of two sides of the step pattern (14) that extends along the longitudinal direction of the test line (12) is positioned therebelow so as to form a step extending in a direction of the test line. Thus, since electromigration tends to easily take place, the deterioration of the semiconductor device can be precisely evaluated.