The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 1998
Filed:
Jul. 17, 1997
Hans-Jurgen Kahlert, Gottingen, DE;
Berthold Burghardt, Waake, DE;
Microlas Lasersystm GmbH, Gottingen, DE;
Abstract
An optical apparatus for the homogenization of laser radiation, in particular of an excimer laser, and for the generation of several lighting fields (F1, F2) from this radiation comprises a plurality of acentric lens segments (G1a, G1b, G1c, G1d; G2a, G2b, G2c, G2d). The acentric lens segments are characterized in that they are segments of cylindrical lenses with an axis of symmetry and that the portion of the cylindrical lens which contains the axis of symmetry is not part of the acentric lens segment. Several groups (G1, G2) of acentric cylindrical lens segments are provided, with each group generating a lighting field (F1, F2) of homogeneous energy density. A collecting lens (S) is arranged downstream of the acentric lens segments, which generates the lighting fields (F1, F2) on a work plane (E).