The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 1998
Filed:
Feb. 28, 1997
Andre Wisard, Adlikon, CH;
Wolfgang Lohwasser, Gailingen, DE;
Abstract
Device containing a vacuum chamber 30 and situated therein a substrate 10 and a vaporization crucible 22 filled with inorganic materials 24. Situated in the region of the vacuum chamber 30 is an electron beam or laser gun 26, the electron or laser beam 27 of which is directed at the crucible 22. The device is employed for coating a substrate surface 18 e.g. a plastic film with a thin coating of inorganic materials, such as e.g. silicon oxides, by vapor deposition of the inorganic materials 24. The electron or laser beam 27 of the electron beam or laser gun 26 is directed at the surface of the inorganic materials 24 in the vaporizing crucible 22. The electron or laser beam 27 forms an angle .alpha. of 10.degree. to 80.degree. to the surface of the inorganic materials 24. On vaporizing the inorganic materials 24 an overhang 25 is formed in the inorganic materials 24 and, geometrically, there is no line of sight between the vaporizing inorganic materials and the substrate surface 18. The process performed in the device leads to substrates e.g. plastic films the surfaces of which exhibit no inhomogenieties such as sprayed material, particles or droplets of inorganic materials.