The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 1998
Filed:
Dec. 05, 1996
Dong-Ho Kim, Kyungki-do, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A wafer holder is provided which more stably supports a transferred wafer and prevents interference between a wafer stopper and other elements of the wafer holder. The wafer holder includes a wafer guiding section having a centrally and inwardly inclined surface for stably guiding a wafer, a wafer support section formed at an inner side of the wafer guiding section and having a wider width for more stably supporting the wafer, and a pair of spaced-apart rectangular wafer stopper holes formed between the wafer guiding section and the wafer support section, and having a predetermined size that is wider in the circumferential direction of the wafer support section than in the radial direction. The wafer holder acts to prevent interference between the wafer stopper and other elements when the wafer stopper and the arm move up and down.