The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 1998

Filed:

Jun. 13, 1996
Applicant:
Inventors:

Shunji Watanabe, Tokyo, JP;

Tatsushi Nomura, Machida, JP;

Takamitsu Fujiu, Zama, JP;

Yoshinori Sango, Machida, JP;

Toru Fujii, Takasaki, JP;

Tetsuo Hattori, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B / ; G01P / ; H01L / ;
U.S. Cl.
CPC ...
396 53 ; 7350412 ; 310317 ;
Abstract

When a power switch is turned on, first and second analog switches are turned on while a third analog switch is turned off. Accordingly, at the time of starting, a forced excitation driving circuit supplies to a vibrator an oscillation output pulse which is substantially at the resonance frequency of the vibrator, thereby forcibly driving the vibrator in an excitation manner. Thereafter, when the vibrator substantially attains its stationary state and thereby the charged voltage of a capacitor reaches a threshold value of an inverter, the first and second analog switches are turned off while the third analog switch is turned on. Accordingly, the output of a self-excitation circuit is supplied to the electrode of the vibrator so as to vibrate the vibrator in a self-excitation manner.


Find Patent Forward Citations

Loading…