The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 1998
Filed:
Jul. 15, 1996
Tony Kroeker, Georgetown, TX (US);
Ben Mooring, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention provides a robot assembly for transferring objects, namely substrates, through a process system. A robot linkage is provided to a multi-plane, multi-arm robot assembly driven by two motors. In one embodiment, a linkage is provided which is driven by two magnetic retaining rings. In another embodiment, a linkage is provided which is driven by three magnetic retaining rings, two of which are coupled to the same motor. Both embodiments enable a substrate shuttle operation to be performed wherein a pair of substrates can be shuttled into and out of a selected chamber without having the robot assembly rotate in the transfer and by actuation of only two motors.