The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 1998
Filed:
Jan. 25, 1996
Applicant:
Inventor:
Edgar Kuhn, Stuttgart, DE;
Assignee:
Alcatel NV, , NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ;
U.S. Cl.
CPC ...
216 24 ; 437129 ; 385130 ; 216 40 ;
Abstract
A process for fabricating multisegment ridge waveguides is disclosed which is self-aligning and avoids unnecessary masking and etching steps. The process essentially comprises five steps: removing, in a starting layer structure, a top layer (DS) on both sides of areas where segment transitions (ST) are to be formed; depositing a metal contact layer (KM); etching a desired ridge-waveguide structure (R); covering the entire area except the segment transition areas with photoresist; and removing the contact layer (KM) in the segment transition areas by a lift-off step, thus providing electrical separation between the individual segments.