The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 1998
Filed:
Mar. 06, 1997
Applicant:
Inventor:
Albert A Burk, Jr, Murrysville, PA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118730 ; 118500 ;
Abstract
A susceptor assembly for use in an epitaxial growth reactor for growing silicon carbide epitaxial layers. The susceptor assembly is rotatable about a central axis and includes a plurality of cavities each for receiving a wafer holder. A plurality of gas passageways leading to respective cavities, carries gas for levitating and rotating the wafer holders in their respective cavities. All of the gas passageways in the susceptor assembly are non-radially oriented.