The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 1998
Filed:
Nov. 03, 1994
Applicant:
Inventors:
Andrews S Dewa, Camas, WA (US);
Christophe J Sevrain, Ridgefield, WA (US);
Assignee:
Memstek Products, LLC, Vancouver, WA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B / ;
U.S. Cl.
CPC ...
417415 ; 417417 ; 4174231 ; 4174103 ;
Abstract
A microfabricated, remotely actuated fluid pump includes a LIGA-fabricated movable member disposed within a cavity. The LIGA-fabricated movable member and the cavity cooperate to (a) define a sufficiently small clearance therebetween to achieve effective pumping action while (b) presenting a sufficiently low-friction fit to enable remote actuation. Such a pump can take the form of a piston pump, a vane pump, a centrifugal pump, a gear pump, etc. Other fluidic devices including flow sensors, piston valves, hydraulic motors, nozzles, and connectors can be fabricated using similar principles.