The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 1998
Filed:
Apr. 15, 1996
Applicant:
Inventor:
Blasius Brezoczky, San Jose, CA (US);
Assignee:
Phase Metrics, Inc., , US;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T / ;
U.S. Cl.
CPC ...
382108 ; 382141 ; 356371 ;
Abstract
An optical inspection apparatus detects anomalies by reflecting a beam of coherent light off the surface of a sample. An anomaly present on the surface causes the reflected beam to be diffracted at an angle which corresponds to a scale of the anomaly. An optical detection array is positioned to receive the reflected diffraction pattern and produce an electrical signal which corresponds to the diffraction angle of the reflected pattern. The electrical signal may then be processed to determine the location and scale of the anomaly from the detected diffraction angle.