The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 1998
Filed:
Nov. 14, 1996
Applicant:
Inventors:
Futoshi Mori, Kanagawa-ken, JP;
Kazuhiko Fukazawa, Tokyo, JP;
Hiroshi Hirose, Kanagawa-ken, JP;
Yoshiaki Kohama, Kanagawa-ken, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250310 ; 25044211 ; 250398 ;
Abstract
A stage on which a sample is placed is driven through feed screws rotated by pulse motors which are controlled by a micro-step drive control method. Backlash quantities and feed screw pitch errors have previously been obtained and stored in a memory, and when the stage is to be driven, a stage controller corrects the backlash and pitch errors.