The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 1998

Filed:

Oct. 01, 1996
Applicant:
Inventors:

Terry D Born, Kula, HI (US);

Daniel O'Connell, Kihei, HI (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118730 ; 118500 ; 20429827 ; 20429828 ;
Abstract

A optical surface is mounted on a mirror rotating system having a carousel therein having gears which rotates said optical surface in a circular path while the optical surface itself rotates about an axis. The radius between the mirror support and the planetary gear is adjustable. The system is mounted on support legs within the vacuum chamber so that the optical surface can face downward when the apparatus is placed in a bell jar (or any such environment which provides a vacuum). A source of vaporized substance is placed under the apparatus, so that the optical surface, facing downward, is facing said source. This arrangement allows for an improvement in the uniformity of the substance deposited on the optical surface.


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