The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1998
Filed:
Apr. 19, 1996
Applicant:
Inventors:
Tsen-Hwang Lin, Dallas, TX (US);
Gregory A Magel, Dallas, TX (US);
Wen R Wu, Plano, TX (US);
Robert M Boysel, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
359224 ; 359295 ; 359900 ; 257414 ; 257415 ; 385 16 ; 385 40 ; 385 50 ;
Abstract
A membrane device is provided in which a plurality of ridges (14) and recesses (16) are formed proximate to a substrate (12). Electrodes (18) are formed within the recesses (16). A spacer (20) supports a membrane (22). Application of a potential difference between the membrane (22) and the electrodes (18) allows for deflection of the membrane (22) toward the electrodes (18).