The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1998
Filed:
Jan. 24, 1997
Applicant:
Inventor:
Pieter J Kerstens, Boca Raton, FL (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356394 ; 356359 ;
Abstract
Microscopic apparatus for inspecting electronic circuit chips includes an illumination source directing light at a chip at an oblique angle with respect to a normal plane perpendicular to its surface. To take advantage of specular reflection, a lens is arranged to view the chip also at an oblique angle, placing an image of a strip of the circuit chip on a linear CCD. Movement of the circuit chip in a scanning direction causes the image to flow across the circuit chip in a transverse direction, allowing a two-dimensional data pattern to be formed with data from successive operations reading data from the CCD.