The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1998
Filed:
Jan. 13, 1995
Derek Aqui, San Jose, CA (US);
High Yield Technology, Inc., Sunnyvale, CA (US);
Abstract
A system and a method provide a vacuum seal to be used when mounting an optical device onto a process chamber or a pump line removing exhaust gas from a process chamber. The system of the present invention includes: (a) a threaded nipple, having an internal mating surface and a threaded external surface, that is attached to the process chamber or to the pump line; (b) an internally threaded coupling, provided for accommodating the optical device, that is screwed onto the threaded external surface of the nipple, and having internally a first mating surface touching the internal mating surface of the nipple and a second mating surface; (c) a window placed on the second mating surface of the coupling; (d) means for creating a vacuum seal, e.g. an elastomer O-ring, between the first mating surface of the coupling and the mating surface of the nipple; and (e) means for creating a vacuum seal, e.g. an elastomer O-ring, between the second mating surface of the coupling and the mating surface of the window. In one embodiment, an externally threaded retaining ring located adjacent to the window is screwed into the coupling until the second mating surface of the coupling and the mating surface of the window touch.