The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1998
Filed:
Jun. 24, 1996
David William Skelly, Burnt Hills, NY (US);
General Electric Company, Schenectady, NY (US);
Abstract
An improved method for depositing zirconium oxide from a zirconium oxide source onto a substrate by means of physical vapor deposition is described. The method includes the step of adding zirconium metal to the zirconium oxide source, which is usually in the form of a cylindrical ingot. The zirconium metal is present in an amount sufficient to chemically bond with a substantial portion of oxygen which would otherwise be freed from the oxide source, as both the zirconium metal and the zirconium oxide source are evaporated during physical vapor deposition. The invention is especially suited for EB-PVD techniques, in which an electron beam is used to evaporate the zirconium metal and the zirconium oxide source during physical vapor deposition. In one embodiment, the zirconium metal comprises a tube which surrounds and contacts at least a portion of the outer surface of the ingot. In another embodiment, the zirconium metal is in the form of a rod inserted in a cavity within the ingot.