The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1998
Filed:
Jul. 10, 1997
Applicant:
Inventors:
Satoshi Watanabe, Nakakubiki-gun, JP;
Toshinobu Ishihara, Nakakubiki-gun, JP;
Ichiro Kaneko, Nakakubiki-gun, JP;
Katsuyuki Oikawa, Nakakubiki-gun, JP;
Yoshihumi Takeda, Nakakubiki-gun, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
F21V / ; B05B / ; B05D / ;
U.S. Cl.
CPC ...
252582 ; 252587 ; 252589 ; 427161 ; 427162 ;
Abstract
An anti-reflective coating composition comprising a polyimide dissolved in an organic solvent is used to form an anti-reflective coating beneath a chemical amplification type resist layer. The composition allows a fine resist pattern to be formed with high accuracy in a convenient, efficient, reproducible manner.