The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 1998
Filed:
Feb. 10, 1997
Yung-Tsai Yen, Atherton, CA (US);
Qoang Rung Bih, San Jose, CA (US);
Micro Lithography, Inc., Sunnyvale, CA (US);
Abstract
One aspect of the invention comprises a method of assembling an optical pellicle including a pellicle frame and a pellicle membrane in which adhesive is first applied to the pellicle frame, and then solvent in the adhesive is permitted to evaporate. Normally the step in which solvent is permitted to evaporate involves baking the frame with the adhesive thereon at an elevated temperature. The pellicle membrane is then placed over the adhesive covered frame, and a laser is used to bond the membrane to the frame. An additional, optional step to this process involves application of the laser to the outer edge of the pellicle membrane after the membrane is mounted to the pellicle frame to trim off excess membrane.