The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 1998
Filed:
Jan. 17, 1997
Applicant:
Inventor:
Chang-Jae Lee, Choongcheongbuk-Do, KR;
Assignee:
LG Semicon Co., Ltd., Cheongju, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429811 ; 20429809 ; 20419212 ;
Abstract
A semiconductor fabrication apparatus which includes a collimator made of a net type heating material which generates Joule heating when electric power is supplied thereto. The apparatus includes a negative electrode having a metallic target, a positive electrode arranged opposite the negative electrode, on which positive electrode a semiconductor substrate is mounted, and the collimator being mounted between the negative electrode and the positive electrode and near the semiconductor substrate, with the collimator being made of a net type heating material and designed so that Joule heating is generated therein when a current is applied thereto.