The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 1998

Filed:

Apr. 07, 1997
Applicant:
Inventors:

Tunehiko Sonoda, Tokyo, JP;

Masahiro Oono, Tokyo, JP;

Masato Noguchi, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01B / ; G01B / ; G01M / ;
U.S. Cl.
CPC ...
364525 ; 356355 ; 356363 ; 356359 ;
Abstract

A device for measuring a characteristic of an optical element which forms an interference fringe pattern using a reference light beam reflected from a reference surface and a test light beam that is guided from the optical element by a light refracting element. The interference fringe pattern is detected and data corresponding to the interference fringe pattern is output. The outputted data is processed such that information of wave front aberration representative of the interference fringe pattern is output. The information includes mathematical terms representative of position errors and of the characteristic of the optical element. The mathematical terms are calculated, and the mathematical terms representative of the characteristic of the optical element are corrected based on a value of at least one of the mathematical terms representative of the position errors. The corrected mathematical terms are then displayed.


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