The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 1998
Filed:
Sep. 04, 1996
Applicant:
Inventor:
Roger L Verkuil, Wappinger Falls, NY (US);
Assignee:
Smithley Instruments, Inc., Cleveland, OH (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ;
U.S. Cl.
CPC ...
324767 ; 2504922 ;
Abstract
The surface of a wafer is charged with corona passing through a screen. The screen is part of a feedback loop that forces a constant corona current. This results in the potential of the wafer surface following the potential of the screen. This allows contemporaneous measurement of the surface charge and potential that are used to measure mobile charge in an oxide layer on the wafer.
Verkuil, Roger. (1998). Method and apparatus for measurement of mobile charges with a corona (U.S. Patent No. 5767693). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5767693
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile