The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 1998
Filed:
May. 21, 1996
Yoshimi Kawanami, Kokubunji, JP;
Shigeyuki Hosoki, Hachioji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A method of observing an electric defect inside a solid sample directly by observing the situation in which conduction electrons are scattered inside the solid sample and means for realizing the method are described. A thin film electrode 2 is arranged opposite to the surface of the solid sample 1 with a minute gap, potential difference is applied between the solid sample 1 and the thin film electrode 2 by a gap voltage supply 7, conduction electrons inside he solid sample 1 are extracted outside the sample 1 by tunnel effect, and an electronic image by these extracted electrons is formed and displayed using an electronic optical system 5. By observing said electronic image, the situation of scattering of conduction electrons inside the solid sample 1 can be known and further, the information of an electric defect inside the solid sample 1 can be obtained.