The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 1998

Filed:

Apr. 17, 1996
Applicant:
Inventor:

Hiroshi Matsui, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; B05C / ;
U.S. Cl.
CPC ...
427-8 ; 427-9 ; 427 10 ; 427240 ; 118663 ; 118712 ; 118 52 ;
Abstract

A cup with a top opening is disposed in an open-air space, and an atmospheric pressure sensor is disposed externally to the cup. A CPU calculates a control value which compensates for a variation in the thickness of a coating film which is formed on a surface of a substrate, based on an atmospheric pressure value which is measured by the atmospheric pressure sensor. An air-conditioner is controlled in accordance with the control value, whereby the temperature and the humidity of clean air which is supplied around the cup are adjusted and the variation in the thickness of the coating film is prevented without laborious work.


Find Patent Forward Citations

Matsui, Hiroshi. (1998). Method of an apparatus for forming film on substrate by sensing (U.S. Patent No. 5766671). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5766671

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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