The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 1998
Filed:
Oct. 16, 1996
Applicant:
Inventors:
Soon-Jung Park, Yongin-gun, KR;
Chung-Jae Lee, Yongin-gun, KR;
Jong-Sun Yun, Yongin-gun, KR;
Young-Ho Park, Yongin-gun, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156345 ; 438-5 ; 438 10 ;
Abstract
An interface apparatus located between a chamber unit and a stepper main controller, which collectively constitute a stepper adapted to form a pattern film on a semiconductor substrate by using a photolithography process well-known in the art. The interface is adapted to detect and control abnormal operational states within the chamber unit via a main controller on the main stepper unit even if the main stepper unit and the chamber unit are made by different manufacturers.