The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 1998
Filed:
Feb. 06, 1997
Applicant:
Inventors:
Nobukazu Oba, Gamagori, JP;
Yasutoshi Suzuki, Okazaki, JP;
Inao Toyoda, Okazaki, JP;
Masaki Onoue, Nagoya, JP;
Assignee:
Denso Corporation, Kariya, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01L / ; H01C / ;
U.S. Cl.
CPC ...
73727 ; 296211 ;
Abstract
A semiconductor pressure sensor includes a diaphragm of an octagonal shape formed on a (110) silicon substrate by anisotropic etching. When a distance between two sides of the diaphragm, which are defined by intersecting lines of a (110) face and a (111) face of the silicon substrate, is represented as L1 and a length of a side of the diaphragm, which is defined by an intersecting line of the (110) face and a (100) face, is represented as L2, the diaphragm is formed so as to satisfy the following relationship: