The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 1998
Filed:
Apr. 30, 1996
Applicant:
Inventor:
Hee-sun Chae, Suwon, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G08B / ;
U.S. Cl.
CPC ...
340588 ; 340584 ; 340603 ; 340679 ; 340626 ; 340521 ; 340540 ; 73709 ; 73 / ; 73749 ; 364557 ; 364558 ; 36455101 ;
Abstract
A vacuum controlling apparatus is provided. The vacuum level of a vacuum chamber can be accurately maintained by measuring and controlling the vacuum level of the vacuum chamber by using six parameters: desired pressure, predetermined time for reaching the desired pressure, predetermined temperature, actual pressure, actual time for reaching the desired pressure, and actual temperature.
Chae, Hee-sun. (1998). Vacuum apparatus for semiconductor device (U.S. Patent No. 5760693). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5760693
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile