The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 1998
Filed:
Sep. 24, 1996
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A method of controlling a stage includes the steps of setting a plurality of drive modes according to which the stage is driven, which correspond to a plurality of positioning processes for positioning an element supported by the stage, and driving the stage according to the plurality of drive modes corresponding to the plurality of positioning processes. An exposure apparatus employing such a method includes a stage mechanism on which a substrate is placed, an exposure device for exposing the substrate to light, a memory for storing data representing a plurality of drive modes according to which the stage mechanism is driven for positioning the substrate, a driver for driving the stage mechanism in accordance with the drive modes, and a controller for selecting one of the drive modes stored in the memory in accordance with a positioning process according to which the substrate is to be positioned, and for controlling the driver in accordance with the selected drive mode.