The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 1998
Filed:
Nov. 13, 1995
Applicant:
Inventors:
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438386 ; 438243 ;
Abstract
A circuit structure having at least one capacitor and a method for the manufacture thereof. The capacitor is constructed of a doped, single-crystal silicon substrate (1) that is provided with a plurality of hole openings (3) by electrochemical etching in a fluoride-containing, acidic electrolyte wherein the substrate is connected as an anode. The capacitor is further constructed of a dielectric layer (4) and of a conductive layer (5) as a cooperating electrode.