The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 1998
Filed:
Nov. 01, 1995
Applicant:
Inventors:
Scott G Singlevich, Colorado Springs, CO (US);
Bradley S Holway, Colorado Springs, CO (US);
Kurt D Humphrey, Colorado Springs, CO (US);
Brian Scott Poarch, Colorado Springs, CO (US);
Michael R Reeder, Colorado Springs, CO (US);
Neal J Verzwyvelt, Colorado Springs, CO (US);
Assignee:
United Technologies Corporation, Windsor Locks, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438131 ; 438467 ; 438600 ; 438D / ;
Abstract
An antifuse includes a metal cap layer located at the second barrier layer of the antifuse to improve the antifuse yield and long term reliability. An antifuse further includes one or more interfacial oxide film layers surrounding an antifuse dielectric layer to provide narrowing of the antifuse programming voltage distribution and to further improve the antifuse yield and long term reliability.