The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 1998
Filed:
Aug. 15, 1994
Craig A Bercaw, Sunnyvale, CA (US);
Laxman Murugesh, Santa Clara, CA (US);
Joshua E Byrne, Los Altos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Corrosion of an aluminum article exposed to corrosive halogen-containing species within semiconductor processing apparatus is avoided by fabricating the aluminum article from a high purity aluminum-magnesium alloy having a magnesium content of about 0.1% to 1.5% by weight, either throughout the entire article or at least in the surface region which is to be rendered corrosion-resistant, and a mobile impurity atom content of less than 0.2% by weight. Upon exposure of the article to a halogen-containing species, a protective magnesium halide layer is formed beneath the surface of the article. The protective layer prevents halogens from penetrating to the base aluminum, thereby protecting the article from corrosion and cracking. To protect the magnesium layer from abrasion, the article preferably also includes a hard, cohesive coating over the magnesium halide layer. A preferred cohesive coating is aluminum oxide or aluminum nitride.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile