The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 1998
Filed:
Sep. 13, 1996
Applicant:
Inventor:
George R Misium, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430313 ; 430319 ; 430330 ;
Abstract
A capacitor and method of forming the capacitor for high density applications. The capacitor (100) comprises a storage node (106) having peaks (108) formed on a surface thereof. The peaks (108) are created by forming a photoresist residue layer (130) on the polysilicon layer of the storage node (108). The structure is then dry etched using the residue layer (130) as a mask to create peaks (108).