The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 1998
Filed:
Apr. 07, 1997
Applicant:
Inventors:
Hitoshi Nagafune, Tokyo, JP;
Takaaki Fukumoto, Tokyo, JP;
Hakushi Shibuya, Tokyo, JP;
Koji Ezaki, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01L / ; B01D / ;
U.S. Cl.
CPC ...
29 2501 ; 454187 ; 553852 ;
Abstract
Apparatus comprising an outside-air conditioner 2, an operation zone 4, a ceiling filter 8 such as an HEPA or ULPA filter, a fan filter unit 9 comprising a chemical filter and a draft fan arranged only on an overhead carrying apparatus 5 and storing apparatus 6 arranged in the operation zone 4 in a clean room 1 chemical mist causing chemical contamination is removed to the carrying apparatus 5 and storing apparatus 6.