The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 1998
Filed:
Sep. 12, 1996
Applicant:
Inventors:
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07F / ; C08F / ; G03C / ;
U.S. Cl.
CPC ...
540200 ; 540354 ; 540358 ; 540252 ; 540463 ; 540451 ; 540485 ; 540487 ; 540524 ; 540525 ; 540526 ; 540531 ; 546 14 ; 546 21 ; 546243 ; 548110 ; 548111 ; 548544 ; 548545 ; 548551 ; 5253269 ;
Abstract
N-vinyllactam derivatives protected at the 3-position are provided and represented by the following formula (I). These are polymerized into homo- and copolymers for use in microlithography of semiconductor manufacture. The polymers are used as a photoresist material suitable for a deep UV process so that pictures of high sensitivity and high resolution can be obtained. In addition, ultrafine circuits can be formed and an exceptional improvement in pattern formation can be accomplished through the use of the photoresist of the invention. ##STR1##