The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 1998
Filed:
Apr. 18, 1995
Applicant:
Inventors:
Tatsuo Urushidani, Yokosuka, JP;
Shinji Ogino, Kamakura, JP;
Assignee:
Fuji Electric Co. Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438478 ; 438492 ; 438690 ; 438931 ; 438959 ; 438974 ;
Abstract
A silicon carbide substrate is dry-polished using chromium oxide Cr.sub.2 O.sub.3, ion oxide Fe.sub.2 O.sub.3, or cerium oxide CeO.sub.2 to obtain a good polished surface free of mechanical defects and with less crystal distortion. Films are then formed on the surface to create an improved electronic device.