The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 1998
Filed:
Dec. 22, 1993
Joe Ritrosi, Crystal Lake, IL (US);
Gary Schmitt, Scotts Valley, CA (US);
Carl Quintino, San Jose, CA (US);
Gerhard Kasper, Walnut Creek, CA (US);
Liquid Air Corporation, Walnut Creek, CA (US);
Abstract
A method and system for purging an ultra-high purity gas supply manifold comprising: a process connection through which ultra-high purity gas is communicated to a process; a first pigtail conduit in selective flow communication with a high purity gas source; a second pigtail conduit in selective flow communication with said process connection; means for creating a vacuum and means for selectively placing said vacuum means in communication with said first pigtail; an ultra-high purity process gas source; a block valve assembly comprising an inlet port in flow communication with said process gas source, a first outlet port in selective communication with said purge gas supply through connection with said first pigtail and second outlet port in selective communication with said process connection through connection with said second pigtail.