The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 1998
Filed:
Mar. 04, 1996
Applicant:
Inventors:
Toyohiro Chikyou, Ibaraki, JP;
Nobuyuki Koguchi, Ibaraki, JP;
Assignee:
National Research Institute for Metals, Tsukuba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B / ; G01K / ;
U.S. Cl.
CPC ...
359298 ; 250398 ; 2504922 ; 25049221 ; 2503 / ;
Abstract
A decelerating and focusing ion beam device is provided with an ion source, a focusing lens system having a plurality of focusing lenses and a multiple decelerating lens system having a plurality of decelerating lenses. It is possible to realize selective super-refined crystal growth and superficial etching with very high accuracy.